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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Comments have been incorporated – see highlighted text in the email chain below. I also added the general warning from PLACLN-PR-VSA-CAV-MODE on the VTA/VSA
radiation area. The updated procedure PLACLN-PR-VSA-CAV-PREP has been added to the Ready for Approvals folder. Please delete the current / disapproved version, move the updated procedure to the Approvals folder, and send the updated procedure version out
for approval.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<h2 style="margin-left:0in;text-indent:0in;mso-list:none"><span style="font-size:11.0pt;line-height:115%;font-family:"Calibri",sans-serif;color:#1F497D">
<span style="background:yellow;mso-highlight:yellow">New step 2.2 added and subsequent steps renumbered:
</span></span><span style="background:yellow;mso-highlight:yellow">The VTA / VSA is a radiation area when high power tests are being performed. In addition to flip signs indicating a change in state, the magenta beacons each shield lid are an indication that
high power operation is enabled. Individuals who are not approved to be in the VTA / VSA during high power operation as per the VTA RWP are required to leave the area during high power testing.</span><span style="color:black"><o:p></o:p></span></h2>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Tiffany Ganey<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> Allen Samuels <samuels@jlab.org>
<br>
<b>Sent:</b> Tuesday, April 27, 2021 4:45 PM<br>
<b>To:</b> Tiffany Ganey <ganey@jlab.org><br>
<b>Cc:</b> pansophy <pansophy@jlab.org>; Natalie Brock <nbrock@jlab.org>; Tom Powers <powers@jlab.org><br>
<b>Subject:</b> FW: New DocuShare document routing task (Step 1 Completion): PLACLN-PR-VSA-CAV-PREP.docx<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Tiffany,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Sorry for dropping all this on you. Would you please revise this procedure and re-upload it to ready for approvals? Thanks.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Allen<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> DocuShare Workflow <</span><a href="mailto:docushare@jlab.org"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">docushare@jlab.org</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">>
<br>
<b>Sent:</b> Tuesday, April 27, 2021 3:22 PM<br>
<b>To:</b> Allen Samuels <</span><a href="mailto:samuels@jlab.org"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">samuels@jlab.org</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">><br>
<b>Subject:</b> New DocuShare document routing task (Step 1 Completion): PLACLN-PR-VSA-CAV-PREP.docx<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">You have a new DocuShare document routing task:<br>
<br>
Subject: PLACLN-PR-VSA-CAV-PREP.docx<br>
Date: 04/27/2021 15:22:05<br>
<br>
Step 1 Completion: <br>
<br>
Tiffany Ganey, 04/12/2021 13:47:21 Approved: <br>
<br>
Natalie Brock, 04/12/2021 12:39:10 Approved: <br>
<br>
Tom Powers, 04/27/2021 15:22:03 Disapproved: <o:p></o:p></p>
<p>The gas cart drawing needs to be updated to include the relief valves at the RV after PGX should be removed.<o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><br>
<span style="background:yellow;mso-highlight:yellow">Incorporated. All gas cart drawings have been updated.</span><br>
<br>
<o:p></o:p></p>
<p>Page 14 The term is "lower end" not "bottom." Also add a note that if the capacitance manometer is reading 1.1 Torr it means that it is over-range.<o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="color:#1F497D;background:yellow;mso-highlight:yellow">Incorporated on pages 8 and 14: “The lower end of the …range is …”</span><br>
<br>
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<o:p></o:p></p>
<p>I am not sure what the manual says but tech support says it takes 30 minutes for the RGA to warm up.<o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="color:#1F497D;background:yellow;mso-highlight:yellow">I based the timeline on watching the RCA traces – it takes a couple hours for the lines to approach a baseline (“provide stable readings”).
This may be due to a combination of the RGA warming up and the system lines pumping down. For example, if you look at Plasma0 data on 21Mar25, the RGA was turned off ~ 14:00 and the AMU 28 and 17 lines were “flat” by ~ 15:45.
</span><br>
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<o:p></o:p></p>
<p>Launching plasma main with the RGA selector switch on will turn on the RGA filament . . .<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:27.0pt;text-align:justify"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;background:yellow;mso-highlight:yellow">Bullet updated:
</span><span style="background:yellow;mso-highlight:yellow">Launching PlasmaMain with the RGA selector switch on will turn on the RGA filament. The RGA filament requires approximately 2 hours to warm up and provide stable readings.</span><span style="font-size:10.0pt"><o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><o:p> </o:p></p>
<p>Page 15. <o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><o:p> </o:p></p>
<p>9.6.2 Connect the camera to the ethernet switch, which is located in the computer rack. Note that the Camera is a power over Ethernet (POE) device and will not function unless it is connected to a compatible network switch.<o:p></o:p></p>
<h3 style="margin-left:.4in;text-indent:0in;mso-list:none"><span style="color:#1F497D;background:yellow;mso-highlight:yellow">Step updated:
</span><span style="background:yellow;mso-highlight:yellow">Connect the camera to the Ethernet switch, which is located in the computer rack. Note that the camera is a power over Ethernet (POE) device and will not function unless it is connected to a compatible
network switch</span><o:p></o:p></h3>
<p class="MsoNormal" style="margin-bottom:12.0pt"><o:p> </o:p></p>
<p>9.6.3 words about changing the camera to camera 0 or 2 if the software fails. <o:p></o:p></p>
<h3 style="margin-left:.4in;text-indent:0in;mso-list:none"><span style="font-size:11.0pt;line-height:115%;font-family:"Calibri",sans-serif;color:#1F497D;background:yellow;mso-highlight:yellow">Step updated:
</span><span style="background:yellow;mso-highlight:yellow">Launch the Plasma Camera program and verify that Camera 1 is set to the Active Camera on the Setup tab. If the software fails, try switching the Active Camera to 0 or 2.</span><o:p></o:p></h3>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p>10.3 we should continue to pump on the 1/4" line until we are prepared to put gas into the line. Keep the VN2 and main pump valve open.<o:p></o:p></p>
<p><span style="background:yellow;mso-highlight:yellow">The procedure was written to avoid the cavity being open to the gas cart pump to the extent practical. If the top plate valve is open, the cavity should be pumped through the turbo cart. I rearranged
the order of these steps to keep the gas cart pumping for longer. <o:p></o:p></span></p>
<p><span style="background:yellow;mso-highlight:yellow"><o:p> </o:p></span></p>
<div style="mso-element:para-border-div;border-top:double windowtext 1.5pt;border-left:none;border-bottom:double windowtext 1.5pt;border-right:none;padding:1.0pt 0in 1.0pt 0in;background:#DEEAF6">
<p class="MsoListParagraph" style="margin-left:.3in;text-indent:-.3in;mso-list:l0 level1 lfo2;display:none;background:#DEEAF6;border:none;padding:0in">
<![if !supportLists]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">1<span style="font:7.0pt "Times New Roman"">
</span></span></span></b><![endif]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><o:p> </o:p></span></b></p>
<p class="MsoListParagraph" style="margin-left:.3in;text-indent:-.3in;mso-list:l0 level1 lfo2;display:none;background:#DEEAF6;border:none;padding:0in">
<![if !supportLists]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">2<span style="font:7.0pt "Times New Roman"">
</span></span></span></b><![endif]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><o:p> </o:p></span></b></p>
<p class="MsoListParagraph" style="margin-left:.3in;text-indent:-.3in;mso-list:l0 level1 lfo2;display:none;background:#DEEAF6;border:none;padding:0in">
<![if !supportLists]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">3<span style="font:7.0pt "Times New Roman"">
</span></span></span></b><![endif]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><o:p> </o:p></span></b></p>
<p class="MsoListParagraph" style="margin-left:.3in;text-indent:-.3in;mso-list:l0 level1 lfo2;display:none;background:#DEEAF6;border:none;padding:0in">
<![if !supportLists]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">4<span style="font:7.0pt "Times New Roman"">
</span></span></span></b><![endif]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><o:p> </o:p></span></b></p>
<p class="MsoListParagraph" style="margin-left:.3in;text-indent:-.3in;mso-list:l0 level1 lfo2;display:none;background:#DEEAF6;border:none;padding:0in">
<![if !supportLists]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">5<span style="font:7.0pt "Times New Roman"">
</span></span></span></b><![endif]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><o:p> </o:p></span></b></p>
<p class="MsoListParagraph" style="margin-left:.3in;text-indent:-.3in;mso-list:l0 level1 lfo2;display:none;background:#DEEAF6;border:none;padding:0in">
<![if !supportLists]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">6<span style="font:7.0pt "Times New Roman"">
</span></span></span></b><![endif]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><o:p> </o:p></span></b></p>
<p class="MsoListParagraph" style="margin-left:.3in;text-indent:-.3in;mso-list:l0 level1 lfo2;display:none;background:#DEEAF6;border:none;padding:0in">
<![if !supportLists]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">7<span style="font:7.0pt "Times New Roman"">
</span></span></span></b><![endif]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><o:p> </o:p></span></b></p>
<p class="MsoListParagraph" style="margin-left:.3in;text-indent:-.3in;mso-list:l0 level1 lfo2;display:none;background:#DEEAF6;border:none;padding:0in">
<![if !supportLists]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">8<span style="font:7.0pt "Times New Roman"">
</span></span></span></b><![endif]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><o:p> </o:p></span></b></p>
<p class="MsoListParagraph" style="margin-left:.3in;text-indent:-.3in;mso-list:l0 level1 lfo2;display:none;background:#DEEAF6;border:none;padding:0in">
<![if !supportLists]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">9<span style="font:7.0pt "Times New Roman"">
</span></span></span></b><![endif]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><o:p> </o:p></span></b></p>
<p class="MsoListParagraph" style="margin-left:.3in;text-indent:-.3in;mso-list:l0 level1 lfo2;display:none;background:#DEEAF6;border:none;padding:0in">
<![if !supportLists]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10<span style="font:7.0pt "Times New Roman"">
</span></span></span></b><![endif]><b><span style="font-size:14.0pt;line-height:115%;font-family:"Lucida Bright",serif;display:none;background:yellow;mso-highlight:yellow"><o:p> </o:p></span></b></p>
</div>
<h2 style="margin-left:573.3pt;mso-list:l0 level2 lfo2"><![if !supportLists]><span style="line-height:115%;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.1<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Verify:</span><span style="line-height:115%;background:yellow;mso-highlight:yellow"><o:p></o:p></span></h2>
<p class="MsoListParagraphCxSpFirst" style="margin-left:.7in;mso-add-space:auto;text-align:justify;text-indent:-.25in;mso-list:l2 level1 lfo3">
<![if !supportLists]><span style="font-family:Symbol;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Valve to the test stand turbo is closed and the cavity valve to the vacuum cart is open<o:p></o:p></span></p>
<p class="MsoListParagraphCxSpMiddle" style="margin-left:.7in;mso-add-space:auto;text-align:justify;text-indent:-.25in;mso-list:l2 level1 lfo3">
<![if !supportLists]><span style="font-family:Symbol;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Vacuum cart V17 is open and the RGA filament is warmed up.<o:p></o:p></span></p>
<p class="MsoListParagraphCxSpMiddle" style="margin-left:.7in;mso-add-space:auto;text-align:justify;text-indent:-.25in;mso-list:l2 level1 lfo3">
<![if !supportLists]><span style="font-family:Symbol;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">The gas line wall valve is open.<o:p></o:p></span></p>
<p class="MsoListParagraphCxSpLast" style="margin-left:.7in;mso-add-space:auto;text-align:justify;text-indent:-.25in;mso-list:l2 level1 lfo3">
<![if !supportLists]><span style="font-family:Symbol;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">The MFC valve is closed and that the gauge PGX is reading 0.1 Torr.<o:p></o:p></span></p>
<h2 style="mso-list:l0 level2 lfo2"><![if !supportLists]><span style="background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.2<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Set up the PlasmaMain graphs to monitor mass flow (MF), cavity pressure (PCav (Torr)), and %O2. Set one parameter to monitor on each graph and set the time scale on each graph
to 0.2 hours.<o:p></o:p></span></h2>
<h3 style="mso-list:l0 level3 lfo2"><![if !supportLists]><span style="background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.2.1<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Click on the first slot under "Plots" [see
</span><span style="background:yellow;mso-highlight:yellow">Figure 10‑a</span><span style="background:yellow;mso-highlight:yellow"> #1]. On the drop down menu, select the parameter to monitor.<o:p></o:p></span></h3>
<h3 style="mso-list:l0 level3 lfo2"><![if !supportLists]><span style="background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.2.2<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Change the Number Hours [see
</span><span style="background:yellow;mso-highlight:yellow">Figure 10‑a</span><span style="background:yellow;mso-highlight:yellow"> #2]. Highlight the current Number Hours value and type in the number of hours to show in the graph.<o:p></o:p></span></h3>
<p class="MsoNormal" align="center" style="text-align:center"><span style="background:yellow;mso-highlight:yellow"><o:p> </o:p></span></p>
<p class="MsoCaption"><a name="_Toc67660706"></a><a name="_Ref67639918"><span style="mso-bookmark:_Toc67660706"><span style="background:yellow;mso-highlight:yellow">Figure
</span></span></a><span style="mso-bookmark:_Ref67639918"><span style="mso-bookmark:_Toc67660706"><span style="background:yellow;mso-highlight:yellow">10</span></span></span><span style="mso-bookmark:_Ref67639918"><span style="mso-bookmark:_Toc67660706"><span style="background:yellow;mso-highlight:yellow">‑</span></span></span><span style="mso-bookmark:_Ref67639918"><span style="mso-bookmark:_Toc67660706"><span style="background:yellow;mso-highlight:yellow">a</span></span></span><span style="mso-bookmark:_Ref67639918"><span style="mso-bookmark:_Toc67660706"></span></span><span style="mso-bookmark:_Toc67660706"><span style="background:yellow;mso-highlight:yellow">:
PlasmaMain Graph Setup</span></span><span style="background:yellow;mso-highlight:yellow"><br clear="all" style="page-break-before:always">
<o:p></o:p></span></p>
<h2 style="mso-list:l0 level2 lfo2"><![if !supportLists]><span style="line-height:115%;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.3<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">The Cavity Pressure, Mass Flow, and O2% can also be monitored from the PlasmaMain screen. See
</span><span style="background:yellow;mso-highlight:yellow">Figure 10‑a</span><span style="background:yellow;mso-highlight:yellow">.</span><span style="line-height:115%;background:yellow;mso-highlight:yellow"><o:p></o:p></span></h2>
<p class="MsoNormal"><span style="background:yellow;mso-highlight:yellow"><o:p> </o:p></span></p>
<p class="MsoCaption"><a name="_Ref67639518"></a><a name="_Toc67660707"></a><a name="_Ref67639524"><span style="mso-bookmark:_Toc67660707"><span style="mso-bookmark:_Ref67639518"><span style="background:yellow;mso-highlight:yellow">Figure
</span></span></span></a><span style="mso-bookmark:_Ref67639524"><span style="mso-bookmark:_Toc67660707"><span style="mso-bookmark:_Ref67639518"><span style="background:yellow;mso-highlight:yellow">10</span></span></span></span><span style="mso-bookmark:_Ref67639524"><span style="mso-bookmark:_Toc67660707"><span style="mso-bookmark:_Ref67639518"><span style="background:yellow;mso-highlight:yellow">‑</span></span></span></span><span style="mso-bookmark:_Ref67639524"><span style="mso-bookmark:_Toc67660707"><span style="mso-bookmark:_Ref67639518"><span style="background:yellow;mso-highlight:yellow">b</span></span></span></span><span style="mso-bookmark:_Ref67639524"><span style="mso-bookmark:_Toc67660707"><span style="mso-bookmark:_Ref67639518"></span></span></span><span style="mso-bookmark:_Toc67660707"><span style="mso-bookmark:_Ref67639518"><span style="background:yellow;mso-highlight:yellow">:
Mass Flow Parameters to Monitor</span></span></span><span style="background:yellow;mso-highlight:yellow"><o:p></o:p></span></p>
<h2 style="mso-list:l0 level2 lfo2"><![if !supportLists]><span style="background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.4<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Close the gas cart Main Pump valve and VN2.<o:p></o:p></span></h2>
<h2 style="mso-list:l0 level2 lfo2"><![if !supportLists]><span style="background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.5<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Verify the gas line handrail valve is open and the 30-30 gauge on the VSA upper level handrail is indicating a vacuum.<o:p></o:p></span></h2>
<h2 style="mso-list:l0 level2 lfo2"><![if !supportLists]><span style="background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.6<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Open the valve at the top plate between the gas supply line and the cavity.<o:p></o:p></span></h2>
<h2 style="mso-list:l0 level2 lfo2"><![if !supportLists]><span style="background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.7<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Monitor the pressure reading on the Capacitive Manometer (PCav) and pump B.<o:p></o:p></span></h2>
<p class="MsoNormal" style="margin-left:.4in;text-align:justify"><b><u><span style="background:yellow;mso-highlight:yellow">NOTES:<o:p></o:p></span></u></b></p>
<p class="MsoListParagraphCxSpFirst" style="margin-left:45.0pt;mso-add-space:auto;text-align:justify;text-indent:-.25in;mso-list:l1 level1 lfo4">
<![if !supportLists]><span style="font-family:Symbol;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">The pressure readings may increase to approximately 5E-4 Torr on the capacitive manometer and in the 1E-5 Torr range on pump B.<o:p></o:p></span></p>
<p class="MsoListParagraphCxSpLast" style="margin-left:45.0pt;mso-add-space:auto;text-align:justify;text-indent:-.25in;mso-list:l1 level1 lfo4">
<![if !supportLists]><span style="font-family:Symbol;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">The Turbo pump B pressure shall not be allowed to go up to the 1E-2 Torr range.<o:p></o:p></span></p>
<h2 style="mso-list:l0 level2 lfo2"><![if !supportLists]><span style="background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.8<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Fully open V22 while leaving V23 in its nominal operating position and close V21.<o:p></o:p></span></h2>
<h2 style="mso-list:l0 level2 lfo2"><![if !supportLists]><span style="background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.9<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Fully open V13 while leaving V12 in its nominal operating position and close V11.<o:p></o:p></span></h2>
<h2 style="mso-list:l0 level2 lfo2"><![if !supportLists]><span style="background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.10</span></span><![endif]><span style="background:yellow;mso-highlight:yellow">Open the Ar and Ar/O2 tanks. Verify
the tank regulators are set to 5 psi.<o:p></o:p></span></h2>
<h2 style="mso-list:l0 level2 lfo2"><![if !supportLists]><span style="background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.11</span></span><![endif]><span style="background:yellow;mso-highlight:yellow">If not done, open the gas cart valves
VA1, VA2, VM1, and VM2.<o:p></o:p></span></h2>
<h2 style="mso-list:l0 level2 lfo2"><![if !supportLists]><span style="line-height:115%;background:yellow;mso-highlight:yellow"><span style="mso-list:Ignore">10.12</span></span><![endif]><span style="background:yellow;mso-highlight:yellow">In accordance with
the following substeps, slowly open the MFC Valve and begin the process of purging gas while keeping the mass flow below 35 SCCM and the pressure at or below the setpoint pressure.</span><span style="line-height:115%;background:yellow;mso-highlight:yellow"><o:p></o:p></span></h2>
<p class="MsoNormal" style="margin-bottom:12.0pt"><o:p> </o:p></p>
<p>10.12.6.1 and where ever else you use numbers for mass flow include units of SCCM.<o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="background:yellow;mso-highlight:yellow">Incorporated throughout</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><o:p> </o:p></p>
<p>Throughout use a subscript on "O2"<o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="background:yellow;mso-highlight:yellow">Incorporated throughout</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><o:p> </o:p></p>
<p>Approved once these changes are entered.<o:p></o:p></p>
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Tony Reilly, 04/12/2021 11:34:36 Approved: <br>
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